Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Plasma-enhanced atomic layer deposition of amorphous Ru-Si-N thin film as a diffusion barrier of direct plating of Cu|
|2||Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor|
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