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Tetrakis(neopentyl)titanium, ((CH3)3CCH2)4Ti, CAS# 36945-13-8

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-enhanced atomic layer deposition of TiCx films using tetrakis neopentyl titanium and applications to a diffusion barrier and contact material
2Properties of plasma-enhanced atomic layer deposited TiCx films as a diffusion barrier for Cu metallization
3Plasma-enhanced atomic layer deposition of TiCx films using tetrakis neopentyl titanium and applications to a diffusion barrier and contact material

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