Tetrakis (neopentyl) Titanium, ((CH3)3CCH2)4Ti, CAS# 36945-13-8

Plasma Enhanced Atomic Layer Deposition Film Publications

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NumberTitle
1Plasma-enhanced atomic layer deposition of TiCx films using tetrakis neopentyl titanium and applications to a diffusion barrier and contact material
2Plasma-enhanced atomic layer deposition of TiCx films using tetrakis neopentyl titanium and applications to a diffusion barrier and contact material
3Properties of plasma-enhanced atomic layer deposited TiCx films as a diffusion barrier for Cu metallization