Your search for plasma enhanced atomic layer deposition publications discussing Border Trap Densities, NBT returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Al2O3 Insertion Layer for Improved PEALD SiO2/(Al)GaN Interfaces|
|2||The influence of surface preparation on low temperature HfO2 ALD on InGaAs (001) and (110) surfaces|
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