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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
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Continuity Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Continuity returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Work function tuning of plasma-enhanced atomic layer deposited WCxNy electrodes for metal/oxide/semiconductor devices
2Hydrogen plasma-enhanced atomic layer deposition of copper thin films
3ALD ruthenium oxide-carbon nanotube electrodes for supercapacitor applications
4Effects of Hydrogen Plasma Treatments on the Atomic Layer Deposition of Copper