Continuity Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Continuity returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effects of Hydrogen Plasma Treatments on the Atomic Layer Deposition of Copper
2Hydrogen plasma-enhanced atomic layer deposition of copper thin films
3ALD ruthenium oxide-carbon nanotube electrodes for supercapacitor applications
4Work function tuning of plasma-enhanced atomic layer deposited WCxNy electrodes for metal/oxide/semiconductor devices