Remanent Polarization Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Remanent Polarization returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Sub-10-nm ferroelectric Gd-doped HfO2 layers
2Influence of oxygen source on the ferroelectric properties of ALD grown Hf1-xZrxO2 films
3Ferroelectricity of HfxZr1-xO2 thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition
4The effects of layering in ferroelectric Si-doped HfO2 thin films