Remanent Polarization Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Remanent Polarization returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Origin of Ferroelectric Phase Stabilization via the Clamping Effect in Ferroelectric Hafnium Zirconium Oxide Thin Films
2Influence of oxygen source on the ferroelectric properties of ALD grown Hf1-xZrxO2 films
3Sub-10-nm ferroelectric Gd-doped HfO2 layers
4The effects of layering in ferroelectric Si-doped HfO2 thin films
5Ferroelectricity of HfxZr1-xO2 thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition