Your search for plasma enhanced atomic layer deposition publications discussing Dissipation Factors returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Electrical Properties of Al2O3 Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods|
|2||Electrical properties of SrTa2O6 thin films by plasma enhanced atomic layer deposition (PEALD)|
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