Surface Hydroxyl Concentration Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Surface Hydroxyl Concentration returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
2Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied by infrared spectroscopy