Quality Factor Plasma Enhanced Atomic Layer Deposition Publications
Your search for plasma enhanced atomic layer deposition publications discussing Quality Factor returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators |
| 2 | High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition |