Publication Information

Title:
Enhanced non-volatile memory characteristics with quattro-layer graphene nanoplatelets vs. 2.85-nm Si nanoparticles with asymmetric Al2O3/HfO2 tunnel oxide
Type:
Journal
Info:
Nanoscale Research Letters 2015 10:248
Date:
2015-05-28

Author Information

Name Institution
Nazek El-AtabMasdar Institute of Science and Technology Abu Dhabi
Berk Berkan TurgutUNAM - National Nanotechnology Research Center
Ali Kemal OkyayBilkent University
Osama NayfehUNAM - National Nanotechnology Research Center
Osama NayfehUniversity of Illinois - Urbana/Champaign

Films

Plasma HfO2


Film/Plasma Properties

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Capacitance
Analysis: C-V, Capacitance-Voltage Measurements

Characteristic: Threshold Voltage Shift
Analysis: C-V, Capacitance-Voltage Measurements

Substrates

Si(111)

Keywords

Notes

360