Publication Information

Title: Advanced thin conformal Al2O3 films for high aspect ratio mercury cadmium telluride sensors

Type: Journal

Info: Optical Engineering, 51(10), 104003 (October 2012)

Date: 2012-09-17

DOI: http://dx.doi.org/10.1117/1.OE.51.10.104003

Author Information

Name

Institution

U.S. Army Research Laboratory

U.S. Army Research Laboratory

Films

Deposition Temperature Range = 25-80C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

J.A. Woollam

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Veeco Nanoman

Dielectric Constant, Permittivity

C-V, Capacitance-Voltage Measurements

Unknown

Conformality, Step Coverage

SEM, Scanning Electron Microscopy

Unknown

Substrates

Au

Keywords

Notes

560

Disclaimer

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