Publication Information

Title: Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD

Type: Journal

Info: IEEE ELECTRON DEVICE LETTERS, VOL. 33, NO. 2, PP. 203-205, 2012

Date: 2011-10-29

DOI: http://dx.doi.org/10.1109/LED.2011.2174607

Author Information

Name

Institution

University of Southampton

University of Southampton

University of Southampton

University of Southampton

Oxford Instruments

Oxford Instruments

University of Canterbury

University of Canterbury

University of Southampton

University of Southampton

Films

Deposition Temperature = 150C

557-20-0

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Mobility

I-V, Current-Voltage Measurements

Unknown

Substrates

Keywords

Notes

645

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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