K. Sun Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by K. Sun returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD
2Top-down fabricated ZnO nanowire transistors for application in biosensors
3Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications