Publication Information

Title: Coupled used of SKP and C-V measurements to highlight the charge distribution and behavior in the Si/SiO2/Al2O3 stack for silicon solar cells surface passivation

Type: Conference Proceedings

Info: 2015 European Materials Research Society Spring Meeting

Date: 2015-05-13

DOI: https://www.researchgate.net/publication/277272764_Coupled_used_of_SKP_and_C-V_measurements_to_highlight_the_charge_distribution_and_behavior_in_the_SiSiO2Al2O3_stack_for_silicon_solar_cells_surface_passivation

Author Information

Name

Institution

Université Lille 1

University of Tours

Université Lille 1

Université de Versailles Saint-Quentin

Université de Versailles Saint-Quentin

Université Lille 1

Université Lille 1

Films

Plasma Al2O3 using Unknown

Deposition Temperature Range N/A

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Unknown

Chemical Composition, Impurities

SIMS, Secondary Ion Mass Spectrometry

Unknown

Unknown

Kelvin Probe (SPV) Surface PhotoVoltage Measurements

Unknown

Unknown

C-V, Capacitance-Voltage Measurements

Unknown

Substrates

Silicon

Keywords

Solar

Notes

440

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com