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Neeraj Nepal Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Neeraj Nepal returned 19 record(s).

NumberTitle
1Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
2Atomic layer epitaxy for quantum well nitride-based devices
3Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
4Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy
5Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor
6Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
7The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
8Microstructure and Interfaces of Ultra-Thin Epitaxial AlN Films Grown by Plasma-Enhanced Atomic Layer Deposition at Relatively Low Temperatures
9Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
10Atomic Layer Epitaxy AlN for Enhanced AlGaN/GaN HEMT Passivation
11Epitaxial growth of AlN films via plasma-assisted atomic layer epitaxy
12Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy
13Investigation of AlGaN/GaN HEMTs Passivated by AlN Films Grown by Atomic Layer Epitaxy
14Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
15Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
16Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
17Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering
18Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods
19Perspectives on future directions in III-N semiconductor research