E. Martínez-Guerra Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by E. Martínez-Guerra returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | ALD and PEALD deposition of HfO2 and its effects on the nature of oxygen vacancies |