Younghwan Lee Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Younghwan Lee returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Thermal stability of antiferroelectric-like Al:HfO2 thin films with TiN or Pt electrodes |