WCl6, Tungsten Hexachloride, CAS# 13283-01-7
Where to buy
| Number | Vendor | Region | Link |
|---|---|---|---|
| 1 | Yoodatech (Shanghai) Co., Ltd | WCl6, Tungsten Hexachloride - contact maggie@yoodatech.com |
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Growth mechanism and electrical properties of tungsten films deposited by plasma-enhanced atomic layer deposition with chloride and metal organic precursors |