TDEAZr, (Et2N)4Zr, [(C2H5)2N]4Zr, Tetrakis(DiEthylAmido) Zirconium, Zirconium Diethylamide, CAS# 13801-49-5

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1EreztechTetrakis(diethylamino)zirconium

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Barrier Characteristics of ZrN Films Deposited by Remote Plasma-Enhanced Atomic Layer Deposition Using Tetrakis(diethylamino)zirconium Precursor
2Tuning The Photoactivity of Zirconia Nanotubes-Based Photoanodes via Ultrathin Layers of ZrN: An Effective Approach toward Visible-Light Water Splitting
3Characteristics of ZrO2 gate dielectric deposited using Zr(t –butoxide) and Zr(NEt2)4 precursors by plasma enhanced atomic layer deposition method
4Deposition and Plasma Measurements of Zr-Oxide Films with Low Impurity Concentrations by Remote PEALD


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