Search 1628 plasma ALD publications by:
(tert-butylimino)bis(diethylamino)cyclopentadienyltantalum, CAS# 852212-55-6
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|1||Ereztech||(tert-butylimino) bis(diethylamino) cyclopentadienyl tantalum|
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Pt/Ta2O5/HfO2-x/Ti Resistive Switching Memory Competing with Multilevel NAND Flash|