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bis(tert-butylimido)bis(bis(trimethylsilylamido))tungsten(VI), [W(NtBu)2{N(SiMe3)2}2], CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Highly-Conformal Amorphous W-Si-N Thin Films by Plasma Enhanced Atomic Layer Deposition as a Diffusion Barrier for Cu Metallization

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Mark Sowa

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