The publication database currently has 1604 entries.
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200 Films Compositions
271 Precursors and Plasma Gases
76 Deposition Hardwares
249 Film and Plasma Characteristics
85 Theses
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TMSb, trimethyl antimony, SbMe3, CAS# 594-10-5
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon |