The publication database currently has 1692 entries.
Use Advanced Search for more complex searches
Recent Database Additions
Ferroelectricity of HfxZr1-xO2 thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition
Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium
Hydrogen-plasma-assisted hybrid atomic layer deposition of Ir thin film as novel Cu diffusion barrier
Self-limiting diamond growth from alternating CFx and H fluxes
Sub-10-nm ferroelectric Gd-doped HfO2 layers
TMSb, trimethyl antimony, SbMe3, CAS# 594-10-5
Where to buy
| Number | Vendor | Region | Link |
|---|---|---|---|
| 1 | DOCK/CHEMICALS | 🇩🇪 | Trimethylantimony |
| 2 | Pegasus Chemicals | 🇬🇧 | Trimethylantimony |
www.plasma-ald.com does not endorse any chemical suppliers. These links are provided for the benefit of our users. If a link goes bad, let us know.
If you would like your company's precursor products listed, or your existing listing changed or removed, send me an email.
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon |