Search Plasma ALD Publication Database By...

trimethyl antimony, Me3Sb, CAS# 594-10-5

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon

Follow @PlasmaALDGuy
Mark Sowa

Shortcuts



© 2014-2018 plasma-ald.com