Search 1628 plasma ALD publications by:
Search 1628 plasma ALD publications by:
TMSb, trimethyl antimony, SbMe3, CAS# 594-10-5
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
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1 | Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon |