TMSb, trimethyl antimony, SbMe3, CAS# 594-10-5

Where to buy

NumberVendorRegionLink
1DOCK/CHEMICALS🇩🇪Trimethylantimony

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon