DMG, Dimethylgermane, Me2GeH2, CAS# 1449-64-5
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic hydrogen-assisted ALE of germanium|
|2||Atomic layer epitaxy of germanium|