Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
BDIPADS, 1,2-Bis(diisopropylamino)disilane, CAS# 151625-26-2
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
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1 | Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |