BDIPADS, 1,2-Bis(diisopropylamino)disilane, CAS# 151625-26-2

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1Ereztech1,2-Bis(diisopropylamino)disilane

Plasma Enhanced Atomic Layer Deposition Film Publications

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NumberTitle
1Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition