The publication database currently has 1574 entries.
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196 Films Compositions
265 Precursors and Plasma Gases
76 Deposition Hardwares
243 Film and Plasma Characteristics
84 Theses
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HfO2/SiO2 anti-reflection films for UV lasers via plasma-enhanced atomic layer deposition
Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
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BDIPADS, 1,2-Bis(diisopropylamino)disilane, CAS# 151625-26-2
Where to buy
| Number | Vendor | Link |
|---|---|---|
| 1 | Ereztech | 1,2-Bis(diisopropylamino)disilane |
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition |