Search 1628 plasma ALD publications by:
BDIPADS, 1,2-Bis(diisopropylamino)disilane, CAS# 151625-26-2
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition|