Search 1628 plasma ALD publications by:
B(OMe)3, Trimethyl borate, Boric acid trimethyl ester, Methyl borate, CAS# 121-43-7
Where to buy
|3||Alfa Aesar||Trimethyl borate, 99%|
|5||Sigma-Aldrich, Co. LLC||Trimethyl borate 99.999% (trace metal basis)|
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process|
|2||Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process|