Tris(DiMethylAmido)Antimony, Sb[(CH3)2N]3, TDMASb, CAS# 7289-92-1

Where to buy

NumberVendorLink
1GelestTris(Dimethylamino)Antimony
2Strem Chemicals, Inc.Tris(dimethylamino)antimony (99.99%-Sb) PURATREM
3EreztechTris(dimethylamido) antimony(III)

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1GeSbTe deposition for the PRAM application
2Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon
3GeSbTe deposition for the PRAM application
4Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon
5Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon