Hf{η2-(iPrN)2CNEt2}(NEt2)3, CAS# 0-0-0
Plasma Enhanced Atomic Layer Deposition Film Publications
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1 | PEALD of HfO2 Thin Films: Precursor Tuning and a New Near-Ambient-Pressure XPS Approach to in Situ Examination of Thin-Film Surfaces Exposed to Reactive Gases |