Bis(dimethylamino) [(methylaminodimethylsilyl) methylcyclopentadienyl] hafnium(IV), (DNSHf, Hf[η⁵:η¹-Cp(CH₂ ) (SiMe₂)NMe](NMe₂)₂, CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

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