Alane N,N-dimethylethylamine, (CH3)2(C2H5)N:AlH3, DMEAA, CAS# 124330-23-0
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Growth and characterization of aluminum oxide films by plasma-assisted atomic layer deposition |