CF4, Tetrafluoromethane, Carbon Tetrafluoride, CAS# 75-73-0

Informational Websites

NumberWebsite
1https://en.wikipedia.org/wiki/Tetrafluoromethane

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effects of Fluorine Plasma Treatment on the Electronic Structure of Plasma-Enhanced Atomic Layer Deposition HfO2
2Self-limiting diamond growth from alternating CFx and H fluxes
3Improvements on Interface Reliability and Capacitance Dispersion of Fluorinated ALD-Al2O3 Gate Dielectrics by CF4 Plasma Treatment