Et2InN(SiMe3)2, Et2In(HMDS), DiEthyl Indium HexaMethylDiSilazane, DiEthyl Indium Bis(trimethylsilyl)amine, Bis(trimethysilyl)amidodiethyl Indium, CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

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1High mobility polycrystalline indium oxide thin-film transistors by means of plasma-enhanced atomic layer deposition