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3DMAP, Tris(DiMethylAmido)Phosphine, (Me2N)3P, CAS# 1608-26-0
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon |