(2-(N-methylamino)1-MethylEthyleneCyclopentadienyl)Bis(DiMethylAmino)Zr, CAS# 0-0-0
Plasma Enhanced Atomic Layer Deposition Film Publications
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| Number | Title |
|---|---|
| 1 | Plasma-Enhanced Atomic Layer Deposition of Zirconium Oxide Thin Films and Its Application to Solid Oxide Fuel Cells |