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1,3,5-Trimethyl- 1,3,5-trivinylcyclotrisilazane, CAS# 5505-72-6
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | SiCxNy-based resistive and threshold switching by using single precursor plasma-enhanced atomic layer deposition |