Polarization Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Polarization returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Ferroelectricity in hafnia controlled via surface electrochemical state
2Atomic layer deposition of ferroelectric Hf0.5Zr0.5O2 on single-layer, CVD-grown graphene
3Annealing behavior of ferroelectric Si-doped HfO2 thin films
4CeO2 Doping of Hf0.5Zr0.5O2 Thin Films for High Endurance Ferroelectric Memories
5Back-End, CMOS-Compatible Ferroelectric Field-Effect Transistor for Synaptic Weights
6Thermal stability of antiferroelectric-like Al:HfO2 thin films with TiN or Pt electrodes
7Origin of Ferroelectric Phase Stabilization via the Clamping Effect in Ferroelectric Hafnium Zirconium Oxide Thin Films