Your search for plasma enhanced atomic layer deposition publications discussing Film Structure returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure |
| 2 | Plasma-Assisted Atomic Layer Deposition of Al2O3 at Room Temperature |
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