2021 Year in Review
The publication database currently has 1616 entries.
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202 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
250 Film and Plasma Characteristics
88 Theses
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Recent Database Additions
Tailoring angular selectivity in SiO2 slanted columnar thin films using atomic layer deposition of titanium nitride
Characterization of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition
Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
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Film Structure Plasma Enhanced Atomic Layer Deposition Publications
Your search for plasma enhanced atomic layer deposition publications discussing Film Structure returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.