Your search for plasma enhanced atomic layer deposition publications discussing Film Structure returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure|
|2||Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure|
|3||Plasma-Assisted Atomic Layer Deposition of Al2O3 at Room Temperature|
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