Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

Contact us for more information.


Film Structure Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Film Structure returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure
2Plasma-Assisted Atomic Layer Deposition of Al2O3 at Room Temperature
3Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure