Contact Resistance Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Contact Resistance returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM
2Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs
3In situ dry cleaning of Si wafer using OF2/NH3 remote plasma with low global warming potential