Contact Resistance Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Contact Resistance returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs
2In situ dry cleaning of Si wafer using OF2/NH3 remote plasma with low global warming potential
3Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM