Your search for plasma enhanced atomic layer deposition publications discussing Contact Resistance returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM|
|2||Electronic and optical device applications of hollow cathode plasma assisted atomic layer deposition based GaN thin films|
|3||Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs|
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