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Contact Resistance Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Contact Resistance returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM
2Electronic and optical device applications of hollow cathode plasma assisted atomic layer deposition based GaN thin films
3Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs

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I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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