Your search for plasma enhanced atomic layer deposition publications discussing Contact Resistance returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM|
|2||Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs|
|3||In situ dry cleaning of Si wafer using OF2/NH3 remote plasma with low global warming potential|
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