Oxidation Resistance Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Oxidation Resistance returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN
2Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes
3Characteristics of Tungsten Carbide Films Prepared by Plasma-Assisted ALD Using Bis(tert-butylimido)bis(dimethylamido)tungsten