Your search for plasma enhanced atomic layer deposition publications discussing Oxidation Resistance returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Characteristics of Tungsten Carbide Films Prepared by Plasma-Assisted ALD Using Bis(tert-butylimido)bis(dimethylamido)tungsten|
|2||Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN|
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