Hydrogen Desorption Plasma Enhanced Atomic Layer Deposition Publications
Your search for plasma enhanced atomic layer deposition publications discussing Hydrogen Desorption returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films |