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  • Plasma-Enhanced Atomic Layer Deposition
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CTE, Coefficient of Thermal Expansion Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing CTE, Coefficient of Thermal Expansion returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition