Your search for plasma enhanced atomic layer deposition publications discussing Mobile Charge Density returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Capacitance-voltage characteristics of gamma irradiated Al2O3, HfO2, and SiO2 thin films grown by plasma-enhanced atomic layer deposition|
|2||Fast PEALD ZnO Thin-Film Transistor Circuits|
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