Substrate Temperature Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Substrate Temperature returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene
2Al2O3/SiNx-Stacks at Increased Temperatures: Avoiding Blistering During Contact Firing
3Application of spectral ellipsometry to in situ diagnostics of atomic layer deposition of dielectrics on silicon and AlGaN