Your search for plasma enhanced atomic layer deposition publications discussing Substrate Temperature returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Al2O3/SiNx-Stacks at Increased Temperatures: Avoiding Blistering During Contact Firing|
|2||Application of spectral ellipsometry to in situ diagnostics of atomic layer deposition of dielectrics on silicon and AlGaN|
|3||Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene|
© 2014-2019 plasma-ald.com