Substrate Temperature Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Substrate Temperature returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Al2O3/SiNx-Stacks at Increased Temperatures: Avoiding Blistering During Contact Firing
2Application of spectral ellipsometry to in situ diagnostics of atomic layer deposition of dielectrics on silicon and AlGaN
3Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene


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