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Substrate Temperature Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Substrate Temperature returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Al2O3/SiNx-Stacks at Increased Temperatures: Avoiding Blistering During Contact Firing
2Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene

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I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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