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Absorption Edges Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Absorption Edges returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic Layer Deposition of AlN Thin Films in Three Different Growth Regimes
2The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition


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