Optical Band Edge Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Optical Band Edge returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

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1Comparison of trimethylgallium and triethylgallium as 'Ga' source materials for the growth of ultrathin GaN films on Si(100) substrates via hollow-cathode plasma-assisted atomic layer deposition


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