Optical Band Edge Plasma Enhanced Atomic Layer Deposition Publications
Your search for plasma enhanced atomic layer deposition publications discussing Optical Band Edge returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | ALD and PEALD deposition of HfO2 and its effects on the nature of oxygen vacancies |