Your search for plasma enhanced atomic layer deposition publications authored by J. Musschoot returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer deposition of titanium nitride from TDMAT precursor|
|2||Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide|
|3||Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition|
|4||Ru thin film grown on TaN by plasma enhanced atomic layer deposition|
I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: email@example.com
© 2014-2018 plasma-ald.com