Title: Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
Info: Journal of The Electrochemical Society, 157 (4) G111-G116 2010
J.A. Woollam M-2000
Conformality, Step Coverage
OES, Optical Emission Spectroscopy
Ocean Optics QE65000 Spectrometer
Atomic Layer Deposition
Novel macroscopic, high aspect ratio structure.
Available in Dendooven PhD thesis.
I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: email@example.com
© 2014-2017 plasma-ald.com