Y2O3 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Y2O3 films returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
2Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells
3Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
4Study of Y2O3 Thin Film Prepared by Plasma Enhanced Atomic Layer Deposition


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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