Publication Information

Title: Controlled erbium incorporation and photoluminescence of Er-doped Y2O3

Type: Journal

Info: APPLIED PHYSICS LETTERS 87, 011907 2005

Date: 2005-07-01

DOI: http://dx.doi.org/10.1063/1.1984082

Author Information

Name

Institution

University of California - Los Angeles (UCLA)

University of California - Los Angeles (UCLA)

Films

Plasma Y2O3 using Custom

Deposition Temperature = 300C

15632-39-0

7782-44-7

Plasma Er2O3 using Custom

Deposition Temperature = 300C

35733-23-4

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Unknown

Optical Properties

PL, PhotoLuminescence

Unknown

Substrates

Si(100)

Keywords

Optical

Er-doping

Photoluminescence

Notes

References 11 and 13 discuss Er2O3 and Y2O3 processes.

36

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