Ta(NMe2)5, Pentakis(DiMethylAmino)Tantalum, PDMAT, CAS# 19824-59-0

Where to buy

NumberVendorLink
1Strem Chemicals, Inc.Pentakis(dimethylamino)tantalum(V), 99%

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberCompositionTitle
1Ta2O5Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas
2Ta2O5Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
3Ta2O5Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
4Ta2O5Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
5Ta2O5Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
6Ta2O5Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
7TaNxOptical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
8TaNxReaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
9TaNxRu thin film grown on TaN by plasma enhanced atomic layer deposition
10TaNxThermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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