Your search for plasma enhanced atomic layer deposition publications discussing Porosity returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient|
|2||Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers|
|3||Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching|
|4||On the role of nanoporosity in controlling the performance of moisture permeation barrier layers|
|5||Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection|
I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: firstname.lastname@example.org
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