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On the role of nanoporosity in controlling the performance of moisture permeation barrier layers
Type:
Journal
Info:
Microporous and Mesoporous Materials, Volume 188, April 2014, Pages 163-171
Date:
2014-01-10
Author Information
| Name | Institution |
|---|---|
| Alberto Perrotta | Eindhoven University of Technology |
Films
Plasma Al2O3
Plasma SiO2
Film/Plasma Properties
Characteristic: Chemical Composition, Impurities
Analysis: FTIR, Fourier Transform InfraRed spectroscopy
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Calcium Test
Characteristic: Porosity
Analysis: Ellipsometric Porosimetry (EP)
Characteristic: Pore Size Distribution
Analysis: Ellipsometric Porosimetry (EP)
Substrates
Notes
| Oxford Instruments FlexAL PEALD Al2O3 and SiO2 moisture permeation barrier study. |
| 271 |